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Introductory MEMS : Thomas M. Adams and Richard A. Layton fabrication and applications /

By: Material type: TextTextPublication details: New York Springer 2010Description: 444 pISBN:
  • 9788132206637
Subject(s): DDC classification:
  • 621.381 ADA-T
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Item type Current library Collection Shelving location Call number Status Date due Barcode Item holds
Books Books BITS Pilani Hyderabad 621 General Stack (For lending) 621.381 ADA-T (Browse shelf(Opens below)) Checked out 12/08/2025 29931
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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

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