Choudhury-Rai, P., ed. Mems and moems technology and applications / P.Rai- Choudhury - India Printice Hall of India 2000 - 520 p. ISBN: 9788120337527 Subjects--Topical Terms: Optoelectronic devicesMicroelectromechanical systemsᅠ Dewey Class. No.: 621.381 RAI-P