TY  - BOOK
AU  -  Choudhury-Rai, P., ed.
TI  - Mems and moems technology and applications
SN  - 9788120337527
U1  - 621.381 RAI-P 
PY  - 2000///
CY  - India
PB  - Printice Hall of India
KW  - Optoelectronic devices
KW  - Microelectromechanical systemsﾠ
ER  -