Campbell, Stephen A. <br/><br/>
The Science and engineering of microelectronic fabrication / 
Stephen A. Campbell 
 - 2nd ed. 
 - NY  Oxford University  2001 
 - 603 p. 
<br/><br/><label>ISBN: </label>9780195681444 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ﾠ<br/>Semiconductors --Design and constructionﾠ
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM-S