TY  - BOOK
AU  - Ivor, Brodie
AU  - Muray, Julius J., jt. auth.
TI  - Physics Of Micro/Nano-Fabrication
SN  - 9788184894134
U1  - 621.381 BRO-I 
PY  - 2010///
CY  - India
PB  - Springer (India) Pvt. Ltd
KW  - ﾠ
KW  - Thin-film circuitsﾠ
KW  - Microelectronics. ﾠ
ER  -