TY - BOOK AU - Rebeiz, Gabriel M. TI - RF mems: theory, design, and technology SN - 9788126525805 U1 - 621.381 REB-G PY - 2010/// CY - India PB - Wiley India Pvt Ltd KW - ᅠ KW - Microelectromechanical systemsᅠ ER -