TY  - BOOK
AU  - edited by V. K. Jain
TI  - Micromanufacturing processes
SN  - 9781439852903
U1  - 670 JAI-V 
PY  - 2013///
CY  - Boca Raton
PB  - Taylor and Francis
KW  - Technology and engineering  / Nanotechnology and MEMS"
KW  - Technology and engineering / Material Scienceﾠ
KW  - Technology and engineering / Manufacturingﾠ
KW  - Manufacturing processes.ﾠ
KW  - Micromachining.ﾠ
ER  -