TY  - BOOK
AU  - Kubby, Joel A
TI  - Guide to hands-on MEMS design and prototyping
SN  - 9781107645790
U1  - 621.381 KUB-J 
PY  - 2011///
CY  - New York
PB  - Cambridge University Press
KW  - Microelectromechanical systems
ER  -