Jaeger, Richard C. <br/><br/>
Introduction to microelectronic fabrication / 
Richard C. Jaeger 
 - 2nd ed. 
 - NJ  Prentice Hall  2002 
 - 316 p. 
<br/><br/><label>ISBN: </label>9780201444940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ﾠ<br/>Integrated circuits --Very large scale integration --Design and construction --Textbooksﾠ
<br/><br/><label>Dewey Class. No.: </label>621.395 JAE-R