TY  - BOOK
AU  - Jaeger, Richard C.
TI  - Introduction to microelectronic fabrication
SN  - 9780201444940
U1  - 621.395 JAE-R 
PY  - 2002///
CY  - NJ
PB  - Prentice Hall
KW  - ﾠ
KW  - Integrated circuits --Very large scale integration --Design and construction --Textbooksﾠ
ER  -