TY  - BOOK
AU  - Mahalik, Nitaigour Premchand
TI  - MEMS
SN  - 9780070634459
U1  - 621 MAH-N 
PY  - 2007///
CY  - India
PB  - Tata McGraw-Hill
KW  - Microelectromechanical systems
KW  - Mechanical engineering ﾠ
ER  -