Madou, Marc J. <br/><br/>
Fundamentals of microfabrication : the science of miniaturization / 
Marc J. Madou 
 - 2nd ed. 
 - Boca Raton  CRC Press  2002 
 - 723 p. 
<br/><br/><label>ISBN: </label>9780849308260 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ﾠ<br/>Lasers --Industrial applicationsﾠ<br/>Microelectronic packagingﾠ<br/>Machiningﾠ<br/>Microelectromechanical systems --Design and constructionﾠ<br/>Integrated circuits --Design and constructionﾠ<br/>Microelectronicsﾠ
<br/><br/><label>Dewey Class. No.: </label>621.38152 MAD-M