TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication : the science of miniaturization
SN  - 9780849308260
U1  - 621.38152 MAD-M 
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - ﾠ
KW  - Lasers --Industrial applicationsﾠ
KW  - Microelectronic packagingﾠ
KW  - Machiningﾠ
KW  - Microelectromechanical systems --Design and constructionﾠ
KW  - Integrated circuits --Design and constructionﾠ
KW  - Microelectronicsﾠ
ER  -