Senturia, Stephen D. <br/><br/>
Microsystem design / 
Stephen D. Senturia 
 - India  Springer  2001 
 - 689 p. 
<br/><br/><label>ISBN: </label>9788181285461 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronicsﾠ<br/>System design.ﾠ<br/>Microelectromechanical systems --Design and construction.ﾠ
<br/><br/><label>Dewey Class. No.: </label>621.381 SEN-S