TY  - BOOK
AU  - Senturia, Stephen D.
TI  - Microsystem design
SN  - 9788181285461
U1  - 621.381 SEN-S 
PY  - 2001///
CY  - India
PB  - Springer
KW  - Microelectronicsﾠ
KW  - System design.ﾠ
KW  - Microelectromechanical systems --Design and construction.ﾠ
ER  -