Micromechatronics : modeling, analysis and design with MATLAB /
Victor Giurgiutiu and Sergey Edward Lyshevski
- 2nd ed.,
- Boca Raton CRC Press 2009
- 920 p.
Presents an understanding of the engineering underpinnings of integrated technology and develops a modern picture of MEMS engineering. This work emphasizes the modeling, simulation, analysis, design and implementation of high-performance mini - and microscale electromechanical systems.