TY - BOOK AU - Giurgiutiu, Victor AU - Lyshevski, Sergey Edward., jt. auth. TI - Micromechatronics: modeling, analysis and design with MATLAB SN - 9781420065626 U1 - 621 GIU-V PY - 2009/// CY - Boca Raton PB - CRC Press KW - Mechatronics KW - Microelectromechanical systems N1 - Presents an understanding of the engineering underpinnings of integrated technology and develops a modern picture of MEMS engineering. This work emphasizes the modeling, simulation, analysis, design and implementation of high-performance mini - and microscale electromechanical systems ER -