Motamedi, Manouchehr E. <br/><br/>
MOEMS :  micro-opto-electro-mechanical systems edited by 
Manouchehr E. Motamedi. 
 - Washington  SPIE Press  2010 
 - 614 p. 
<br/><br/><label>ISBN: </label>9788122428339 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microfabrication<br/>Optoelectronic devices
<br/><br/><label>Dewey Class. No.: </label>621.381 MOT-M