TY  - BOOK
AU  - Motamedi, Manouchehr E.
TI  - MOEMS: micro-opto-electro-mechanical systems edited by
SN  - 9788122428339
U1  - 621.381 MOT-M 
PY  - 2010///
CY  - Washington
PB  - SPIE Press
KW  - Microelectromechanical systems
KW  - Microfabrication
KW  - Optoelectronic devices
ER  -