TY  - BOOK
AU  - Jones, Thomas B.
AU  - Nenadic, Nenad G.
TI  - Electromechanics and MEMS
SN  - 9781316609040
U1  - 621.381 JON-T 
PY  - 2016///
CY  - India
PB  - Cambridge University Press
KW  - Microelectromechanical systems
KW  - Electromechanical devices
ER  -