TY - BOOK AU - Varadan, V. K. AU - Vinoy, K. J. , jt. auth. TI - RF MEMS and their applications SN - 9788126529919 U1 - 621.38413 VAR-V PY - 2003/// CY - India PB - Wiley KW - Radio circuits --Equipment and supplies. Microelectromechanical systems. Microwave circuits ER -