TY  - BOOK
AU  - Taniguchi, Norio, ed.
TI  - Nanotechnology : integrated processing systems for ultra-precision and ultra-fine products
SN  - 9780195693270
U1  - 620.5 TAN-N 
PY  - 1996///
CY  - India
PB  - Oxford University Press
KW  - Nanotechnology
N1  - Oxford science publications
ER  -