Maluf, Nadim <br/><br/>
An introduction to microelectromechanical systems engineering / 
Nadim Maluf and Kirt Williams 
 - 2nd ed. 
 - Boston  Artech House  2004 
 - 283 p. 
<br/><br/><label>ISBN: </label>9781580535908 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microtechnology
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL-N