TY  - BOOK
AU  - Maluf, Nadim
AU  - Williams, Kirt
TI  - An introduction to microelectromechanical systems engineering
SN  - 9781580535908
U1  - 621.381 MAL-N 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Microtechnology
ER  -