TY  - BOOK
AU  - Bernhard Pogge, H
TI  - Electronic materials chemistry edited by
SN  - 9780824796322
U1  - 621.38 BER-H 
PY  - 1995///
CY  - New York
PB  - Marcel Dekker
KW  - Electronics - Materials
KW  - Chemical Engineering
KW  - Materials Science
N1  - This work examines the fundamentals of fabrication technologies that employ highly sophisticated chemical operations of materials. The material chemistry involved in electronic material technologies, especially microelectronic devices, is covered.
ER  -