Hsu, Tai-Ran <br/><br/>
MEMS and microsystems : design and manufacture / 
Tai-Ran Hsu 
 - India  Tata McGraw-Hill  2002 
 - 436 p. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronic packaging<br/>Microelectromechanical systems. ﾠ<br/>Microelectronics. ﾠ
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU-T