TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems : design and manufacture
SN  - 9780070487093
U1  - 621.381 HSU-T 
PY  - 2002///
CY  - India
PB  - Tata McGraw-Hill
KW  - Microelectronic packaging
KW  - Microelectromechanical systems. ﾠ
KW  - Microelectronics. ﾠ
ER  -