Pilar Gonzalez Ruiz ; Ann Witvrouw Kristin De Meyer <br/><br/>
Poly-SiGe for MEMS-above-CMOS Sensors 

 - Netherlands  Springer  2014 
<br/><br/><label>ISBN: </label>9789400767997 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics: Electronic Circuits and Devices: Circuits and Systems: Optical and Electronic Materials: Nanotechnology and Microengineering: Characterization and Evaluation of Materials