TY  - BOOK
AU  - Pilar Gonzalez Ruiz ; Ann Witvrouw Kristin De Meyer
TI  - Poly-SiGe for MEMS-above-CMOS Sensors
SN  - 9789400767997
PY  - 2014///
CY  - Netherlands
PB  - Springer
KW  - Physics: Electronic Circuits and Devices: Circuits and Systems: Optical and Electronic Materials: Nanotechnology and Microengineering: Characterization and Evaluation of Materials
UR  - http://doi.org/10.1007/978-94-007-6799-7
ER  -