TY  - BOOK
AU  - Andrew J. Fleming ; Kam K. Leang
TI  - Design, Modeling and Control of Nanopositioning Systems
SN  - 9783319066172
PY  - 2014///
CY  - Berlin Heidelberg
PB  - Springer
KW  - Engineering: Control: Mechatronics: Industrial and Production Engineering
UR  - http://doi.org/10.1007/978-3-319-06617-2
ER  -