TY - BOOK AU - Dan Zhang, Bin Wei. TI - Advanced Mechatronics and MEMS Devices II SN - 9783319321806 PY - 2017/// CY - Cham PB - Springer KW - Nanotechnology. Control engineering. Robotics. Mechatronics. Biomedical engineering. Mechanical engineering. Nanotechnology and Microengineering. Control, Robotics, Mechatronics. Biomedical Engineering and Bioengineering. Mechanical Engineering UR - https://doi.org/10.1007/978-3-319-32180-6 ER -