TY - BOOK AU - Michael Huff. TI - Process Variations in Microsystems Manufacturing SN - 9783030405601 PY - 2020/// CY - Cham PB - Springer KW - Nanotechnology. Manufactures. Electronic circuits. Nanotechnology and Microengineering. Manufacturing, Machines, Tools, Processes. Nanotechnology. Circuits and Systems UR - https://doi.org/10.1007/978-3-030-40560-1 ER -