TY  - BOOK
AU  - Kirill Poletkin.
TI  - Levitation Micro-Systems : Applications to Sensors and Actuators
SN  - 9783030589080
PY  - 2021///
CY  - Cham
PB  - Springer
KW  - Microtechnology. Microelectromechanical systems. Materials. Detectors. Microsystems and MEMS. Sensors and biosensors
UR  - https://doi.org/10.1007/978-3-030-58908-0
ER  -