Lena Zentner, Steffen Strehle. <br/><br/>
Microactuators, Microsensors and Micromechanisms : MAMM 2020 

 - Cham  Springer  2021 
<br/><br/><label>ISBN: </label>9783030616526 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechatronics. Nanotechnology. Machinery. Electronics. Mechatronics. Nanotechnology. Machinery and Machine Elements. Electronics and Microelectronics, Instrumentation.