TY - BOOK AU - Lena Zentner, Steffen Strehle. TI - Microactuators, Microsensors and Micromechanisms : MAMM 2020 SN - 9783030616526 PY - 2021/// CY - Cham PB - Springer KW - Mechatronics. Nanotechnology. Machinery. Electronics. Mechatronics. Nanotechnology. Machinery and Machine Elements. Electronics and Microelectronics, Instrumentation UR - https://doi.org/10.1007/978-3-030-61652-6 ER -