Alissa M. Fitzgerald, Carolyn D. White, Charles C. Chung. <br/><br/>
MEMS Product Development : From Concept to Commercialization 

 - Cham  Springer  2021 
<br/><br/><label>ISBN: </label>9783030617097 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microtechnology. Microelectromechanical systems. Manufactures. Nanotechnology. Microsystems and MEMS. Machines, Tools, Processes. Nanotechnology.