TY  - BOOK
AU  - Alissa M. Fitzgerald, Carolyn D. White, Charles C. Chung.
TI  - MEMS Product Development : From Concept to Commercialization
SN  - 9783030617097
PY  - 2021///
CY  - Cham
PB  - Springer
KW  - Microtechnology. Microelectromechanical systems. Manufactures. Nanotechnology. Microsystems and MEMS. Machines, Tools, Processes. Nanotechnology
UR  - https://doi.org/10.1007/978-3-030-61709-7
ER  -