TY  - BOOK
TI  - Semiconductor manufacturing handbook
SN  - 9780071445597
PY  - 2005///
CY  - New York, N.Y.
PB  - McGraw-Hill Education
KW  - Semiconductors Integrated circuits Semiconductors Integrated circuits Dielectrics. Silicides. Plasma engineering. Process control. Vacuum techology. Integrated circuits Microlithography. Ion implantation. Rapid thermal process. Plasma etching. Etching. Physical vapor deposition. Chemical vapor deposition. Epitaxy. Electrolytic polishing. Semiconductors Semiconductors Grinding and polishing. Microelectronic packaging. Electronic packaging. Nanotechnology. Microfabrication. Microelectromechanical systems. Flat panel displays. Gases. Waste gases Hydraulic conveying. Slurry pipelines. Chemical plants Water-supply engineering. Materials handling. Metrology. Six sigma (Quality control standard) Semiconductor industry Semiconductor industry Semiconductor industry Clean rooms Vibration. Noise control. Static eliminators. Electrostatics. Airborne infection. Air Sewage
UR  - https://www.accessengineeringlibrary.com/content/book/9780071445597
ER  -