Microchip fabricationa practical guide to semiconductor processing 
by Peter Van Zant. 
 - 6th ed. 
 - Chicago, Ill.  McGraw-Hill Education LLC.,  2004 
<br/><br/><label>ISBN: </label>9780071821018 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors Integrated circuits TECHNOLOGY &amp; ENGINEERING / Electronics / Semiconductors.