TY - BOOK TI - Microchip fabricationa practical guide to semiconductor processing SN - 9780071821018 PY - 2004/// CY - Chicago, Ill. PB - McGraw-Hill Education LLC. KW - Semiconductors Integrated circuits TECHNOLOGY & ENGINEERING / Electronics / Semiconductors UR - https://www.accessengineeringlibrary.com/content/book/9780071821018 ER -