TY - BOOK AU - Zhang, Sam AU - Ting, Jyh-Ming AU - Wu, Wan-Yu TI - Protective thin coatings technology edited by SN - 9780367542504 U1 - 621.38152 ZHA-S PY - 2022/// CY - Boca Raton PB - CRC Press KW - Protective coatings. KW - Thin films N1 - This book highlights developments and advances in the preparation, characterization, and applications of functional micro-/nano-scaled films and coatings. This comprehensive work will benefit industry professionals and researchers working in areas related to semiconductor, optoelectronics, plasma technology, solid-state energy storages, and 5G, as well as advanced students studying electrical, mechanical, chemical, and materials engineering ER -