This reference reveals the most significant technologies, procedures, and trends in the design and application of actuator devices for micro mechatronics systems. It addresses critical design and manufacturing concepts and challenges in the modelling and regulation of electromechanical losses and heat generation in actuator devices. Accompanied by CD-ROM demonstrating examples of finite-element modelling and previously developed and commercially available actuators, Micromechatronics provides insight into the future of this evolving field and considers recent developments in micropositioning technology and displacement transducer, motor and ultrasonic motor applications. Reveals significant technologies, procedures, and trends in the design and application of actuator devices for micro mechatronics systems. This book addresses critical design and manufacturing concepts and challenges in the modelling and regulating electromechanical losses and heat generation in actuator devices.