| 000 | 00580pam a2200193a 44500 | ||
|---|---|---|---|
| 999 |
_c1030 _d1030 |
||
| 008 | 150502b2000 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788120337527 | ||
| 040 |
_cBITS Pilani Hyderabad _aBITS Pilani Hyderabad |
||
| 041 | _aENG | ||
| 082 | _a621.381 RAI-P | ||
| 100 | _a Choudhury-Rai, P., ed. | ||
| 245 |
_aMems and moems technology and applications / _cP.Rai- Choudhury |
||
| 260 |
_aIndia _bPrintice Hall of India _c2000 |
||
| 300 | _a520 p. | ||
| 650 | _aOptoelectronic devices | ||
| 650 | _aMicroelectromechanical systemsﾠ | ||
| 907 | _a621.381 RAI-P | ||
| 942 | _2ddc | ||