| 000 | 00675pam a2200229a 44500 | ||
|---|---|---|---|
| 999 |
_c14168 _d14168 |
||
| 008 | 150502b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788184894134 | ||
| 040 |
_cBITS Pilani Hyderabad _aBITS Pilani Hyderabad |
||
| 041 | _aENG | ||
| 082 | _a621.381 BRO-I | ||
| 100 | _aIvor, Brodie | ||
| 245 |
_aPhysics Of Micro/Nano-Fabrication / _cIvor Brodie and Julius J. Muray |
||
| 260 |
_aIndia _bSpringer (India) Pvt. Ltd _c2010 |
||
| 300 | _a650 p. | ||
| 650 | _aﾠ | ||
| 650 | _aThin-film circuitsﾠ | ||
| 650 | _aMicroelectronics. ﾠ | ||
| 700 | _aMuray, Julius J., jt. auth. | ||
| 907 | _a621.381 BRO-I | ||
| 908 | _aMuray, Julius J., jt. auth. | ||
| 942 | _2ddc | ||