| 000 | 00706pam a2200205a 44500 | ||
|---|---|---|---|
| 999 |
_c16008 _d16008 |
||
| 008 | 150502b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781574446753 | ||
| 040 |
_cBITS Pilani Hyderabad _aBITS Pilani Hyderabad |
||
| 041 | _aENG | ||
| 082 | _a621.38152 DOE-R | ||
| 100 | _aedited by Doering, Robert | ||
| 245 |
_aHandbook of semiconductor manufacturing technology / _cedited by Robert Doering, Yoshio Nishi |
||
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton _bCRC Press _c2008 |
||
| 650 | _aSemiconductor industry --Handbooks, manuals, etc. | ||
| 650 | _aSemiconductors --Design and construction --Handbooks, manuals, etc.οΎ | ||
| 700 | _aNishi, Yoshio. | ||
| 907 | _a621.38152 DOE-R | ||
| 942 | _2ddc | ||