| 000 | 00537pam a2200181a 44500 | ||
|---|---|---|---|
| 999 |
_c16927 _d16927 |
||
| 008 | 150502b2011 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781107645790 | ||
| 040 |
_cBITS Pilani Hyderabad _aBITS Pilani Hyderabad |
||
| 041 | _aENG | ||
| 082 | _a621.381 KUB-J | ||
| 100 | _aKubby, Joel A | ||
| 245 |
_aGuide to hands-on MEMS design and prototyping / _cJoel A. Kubby |
||
| 260 |
_aNew York _bCambridge University Press _c2011 |
||
| 300 | _a166 p. | ||
| 650 | _aMicroelectromechanical systems | ||
| 907 | _a621.381 KUB-J | ||
| 942 | _2ddc | ||