| 000 | 00540nam a22001817a 4500 | ||
|---|---|---|---|
| 008 | 200313b2004 ||||| |||| 00| 0 eng d | ||
| 020 | _a9781580535908 | ||
| 082 | _a621.381 MAL-N | ||
| 100 | _aMaluf, Nadim | ||
| 245 |
_aAn introduction to microelectromechanical systems engineering / _cNadim Maluf and Kirt Williams |
||
| 250 | _a2nd ed. | ||
| 260 |
_aBoston _bArtech House _c2004 |
||
| 300 | _a283 p. | ||
| 365 |
_aGBP _b79.00. |
||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aMicrotechnology | ||
| 700 | _aWilliams, Kirt | ||
| 999 |
_c64756 _d64756 |
||