000			00754nam a22001817a 4500
008			210601b1995 ||||| |||| 00| 0 eng d
020			_a9780824796322
082			_a621.38 BER-H
100			_aBernhard Pogge, H
245			_aElectronic materials chemistry edited by _cH. Bernhard Pogge
260			_aNew York _bMarcel Dekker _c1995
300			_a623 p.
365			_aINR _b4495.00
500			_aThis work examines the fundamentals of fabrication technologies that employ highly sophisticated chemical operations of materials. The material chemistry involved in electronic material technologies, especially microelectronic devices, is covered.
650			_aElectronics - Materials
650			_aChemical Engineering
650			_aMaterials Science
999			_c66413 _d66413