000			00523nam a2200133Ia 4500
008			2212144s2017 xx 000 0 und d
020			_a9783319508245
041			_aeng
100			_aTing Li, Ziv Liu.
245			_aOutlook and Challenges of Nano Devices, Sensors, and MEMS
260			_aCham _bSpringer _c2017
650			_aElectronic circuits. Nanotechnology. Circuits and Systems. Electronic Circuits and Devices. Nanotechnology and Microengineering. Nanotechnology.
856			_uhttps://doi.org/10.1007/978-3-319-50824-5
999			_c84409 _d84409