000 00639nam a2200133Ia 4500
008 2212144s2018 xx 000 0 und d
020 _a9789811030666
041 _aeng
100 _aYung-Chun Wu, Yi-Ruei Jhan.
245 _a3D TCAD Simulation for CMOS Nanoeletronic Devices
260 _aSingapore
_bSpringer
_c2018
650 _aElectronics. Microelectronics. Semiconductors. Nanotechnology. Industrial engineering. Production engineering. Electronics and Microelectronics, Instrumentation. Semiconductors. Nanotechnology and Microengineering. Industrial and Production Engineering.
856 _uhttps://doi.org/10.1007/978-981-10-3066-6
999 _c84435
_d84435